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SiP metrology for logic n-mos production with AKONIS SIMS tool

星期三, 四月 5, 2023

Logic n-mos production is complex, with multiple critical steps for which our customers are in need of stable, automated Statistical Process Control.
Thanks to a proven single detector technology, the AKONIS automated SIMS tool ensures unequalled long-term stability monitoring of phosphorus in silicon.

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